We also investigated how the post-annealing affected the electrical transport and thermoelectric properties of the fi Fig. 3 shows the result of room temperature measurement of Seebeck coefficients for the films. as-deposited and annealed at various temperatures. The Seebeck coefficients were measured to have a negative value, which indicates that the films are n-type. The coefficient was relatively small for the as-deposited sample and increases substantially with the annealing temperature increasing. from around 65 HVIK for the as-deposited sample to 205 HVIK for the 200 annealed sample. This result signifies that the micro- structure changes upon the annealing at elevated temperatures influenced the thermoelectric properties of the films by improving the Seebeck coefficient more than three times.