What is the role of Cantilever beams in Micromechanical systems?
Cantilever beams are the most omnipresent structure in the field of micromechanical systems (MEMS). An early example of a MEMS cantilever is the “Resonistor”. It is an electromechanical monolithic resonator. MEMS cantilevers are commonly fabricated from silicon (Si), silicon nitride (SiN) or polymers