Modest RF power of less than 1 kW at 13.56 MHz has been applied to two electrodes through a standard RF matching network. Helium as the main carrier gas, argon as the additional carrier gas, and oxygen as the reactive gas
Modest RFpower of less than 1 kW at 13.56 MHz has been appliedto two electrodes through a standard RF matchingnetwork. Helium as the main carrier gas, argon as theadditional carrier gas, and oxygen as the reactive gas