although the available literature data suggest the formation of a
structure very similar to that of Zr3N4-type, but with possible
oxygen inclusions [16]. This change is also confirmed by the
composition data, with the abrupt increase of the concentration of
non-metallic elements. Looking into Table 1 it is possible to
observe that the samples deposited with reactive gas flow varying
from 10 to 13 sccm, present a concentration of the non metallic
elements that varies from 1.22 to 1.33, which in fact is very close
to the stoichiometric value of a Zr3N4-type structure. With a