In the previous work, it had been found that the introduction ofpolymer-derived amorphous SiOC ceramic film on AlN by pyrolysisof PSZ coated AlN under air atmosphere help improved the interfa-cial adhesion as well as the thermal conductivity of silicone rubbercomposites. Thus, in the present work, pyrolysis of PSZ coated AlNat 700◦C in various atmospheres including air, Ar, N2and NH3wascarried out in order to investigate the effect of pyrolysis atmosphereon the introduction of SiOC and SiONC ceramic films on AlN surfaceas well as the thermal conductivity of silicone rubber composites.SiONC coated AlN pyrolyzed at 700◦C in Ar, N2and NH3atmo-spheres are abbreviated hereafter, as SiONC/AlNAr, SiONC/AlNN2and SiONC/AlNNH3, respectively. Besides, SiOC coated AlN heatedin air atmosphere is abbreviated as SiOC/AlNair. Then, surface char-acterization of SiOC/AlNairand SiONC/AlN(Ar, N2and NH3)were alsoinvestigated and evaluated.