Abstract
We investigate a new texturization technique for crystalline silicon solar cells with sodium
carbonate (Na
2
CO
3
) solutions. We show the dependence of the hemispherical surface re#ectance
on solution temperature, the etching time and the Na
2
CO
3
concentration. Furthermore,
we investigate what element in Na
2
CO
3
solution in#uences the texturing for reducing the
texturing time. As a result of experiments, we "nd it possible to get low re#ectance in a shorter
texturing time by the addition of NaHCO
3
. The size of texture becomes smaller by the addition
of NaHCO
3
but the etching rate does not change. We conclude carbonic ion and/or its
compound seems to play an important role as the initiator of pyramidal structure. This
texturing method is cost e!ective because there is no need of expensive IPA, and the surface
re#ectance is reduced su$ciently in a short time. This method is promising for a large-scale
production of crystalline silicon solar cells. ( 2000 Elsevier Science B.V. All rights reserved