In this paper previously developed combined model of non-conformal layer growth is used to calculate positions
in thin-film silicon solar cells where defective regions are expected to be formed within semiconductor layers,
depending on the substrate texture. This enablesomission of the textures leading to cells of poor electrical quality
in the early process of optical optimisation of the cells and substrate texture design. Coupled with threedimensional
rigorous optical simulations, substrate textures are optimised with respect to high short-circuit
current and defectless layer growth in micromorph silicon solar cells. Firstly, the approach of determination of
defective regions is validated on realistic structures. Secondly, analysis of the effects of texture shape and of
the material and the thickness of the grown layer is carried out. Thirdly, optimisation of substrate texture for
micromorph type of solar cell is performed for sinusoidal, widened and semi-circular textures. Results on
widened textures show, that smoothing/widening of the valleys does not always suppress the formation of
defective regions in μc-Si:H and a-Si:H layers. A semi-circular type of the texture is determined to be the most
appropriate for defectless absorbers in the analysed micromorph solar cells in substrate configuration, resulting
also in up to 85% increase in short-circuit current of the bottom cell.