Even more complex is the prospect of mixed or ternary element films. Silicon oxynitride has already been discussed. There are possible films of oxycarbides, sulfides, silicodes, borides, etc., or other mixed, nonoxy, ternary systems. Additionally, the inclusion by vaporization of metal atoms or dopant atoms into the films certainly exists, leading to semiconducting films or films with other unusual electrical properties. The number and types of films that can be produced in a low temperature plasma with their as yet unevaluated mechanical, electrical, and optical properties offer the materials scientist new dimension of research and development.