We report the growth process of silica nanowires (NWs) grown by using a thick Au film as a catalyst,and
suggest an alternative vapor–liquid–solid mechanism for NW growth.The silic aNWs were grown by
high-temperature annealing of silicon substrates coated with an Au film measuring either 20 nm or
60 nmthickinaN2 atmosphere. AnumberofAuparticleswereobservedinsidetheNWs,unlikeNWs
grown a single Au particle attheir top.There sults are attributed to the push-up growth of NWs by the
continuous formation of siliconoxide on the top and/or side surfaces rather than underneath of the
eutectic liquidAu–Si alloy suggested in the conventional vapor–liquid–solid process.