Single phase p-type CuAlO
2
thin
fi
lms were synthesized through the chemical solution deposition method.
The effects of post annealing temperature on the micro-structural, morphological and electrical properties
have been studied. Via the optimized annealing treatment, the Hall effect measurements indicate that the
CuAlO
2
fi
lm belongs to the p-type semiconductor with intrinsic hole carriers of 6.71×10
16
cm
−
3
. The optical
direct bandgap of the CuAlO
2
fi
lm was estimated to be 3.48 eV by room temperature photoluminescence
measurement, while the transmittance in the visible region was as high as 70%.