The TiO2-SiO2 microparticle composites were prepared by deposition of TiO2 particles on the spherical silica particle (SSP) and MCM41 surface using hydrolysis of titanium isopropoxide to obtain TiSSP and TiMCM, respectively. The TiO2-modified metal-surface interaction of SiO2 exhibited the sufficient surface area and pore volume, even decrease with increased calcination temperature. The anatase crystallites of titania on TiSSP and TiMCM began to form at 650 C. At calcination temperature of 900 C, the appearance of a portion of TiO2 had the form of rutile, which was only found in the TiSSP. However, the surface areas of TiSSP and TiMCM calcined at 900 C were remarkably low at 11 and 56 m2/g, respectively. The XRD patterns and DTA/TG indicated that TiMCM had better thermal stability than TiSSP. The titania distribution of both samples was uniform.