XRF Instrumentation
Our XRF system (produced by IXRF, Inc.) is attached to our scanning electron microscope (SEM) and uses our
EDS x-ray detector. We have a 50-kV x-ray tube (Fig. 5, arrows), which produces a 50-μm probe at its focal point.
Since we often deal with very small structures, a focused x-ray probe is invaluable. We often need to evaluate low
elemental content within small structures and a large x-ray probe would not be suited to our needs.