In order to understand the mechanism of structure evolution
with variation of the reactive gas flow, X-ray diffraction (XRD)
analysis was carried out. Fig. 1 shows the X-ray diffraction
patterns for samples prepared with increasing reactive gas flow.
From the obtained diffraction patterns, it is possible to observe
the formation of three different types of structures. The first of
these zones corresponds to the films prepared with gas mixture
flows varying from 6 to 10 sccm, will be noted in the text as
zone I, developed a face centred cubic ZrN type structure.