We report on a simple UV photolithography based
fabrication for an epoxy-based filtration membrane and
its primary features such as the permeability and the
elastic modulus toward a design of polymer-based
microfluidic systems. The elastic modulus of filtration
membrane was measured by an indentation test, and then
which was evaluated by a cross-linked ratio of epoxy
group to clarify the dependence on the process
parameters. It was revealed for the first time that the
elastic modulus for filtration membrane varied from 3.8
GPa to 4.9 GPa according to the cross-linked ratio of 0.5
to 0.75.