A humidity sensor becomes standardized in the field, based on its high performance and integration technology (CMOSens® Technology) in miniature format. CMOSens® Technology enables the sensor component to connected with the analog and digital signal processing circuit on a silicon CMOS chip. This technology includes adapting specific microsystem processing procedure to manufacture the microsensor structures on unique and patented semiconductor parts. It makes all the sensor chips (including humidity and temperature sensor) precise and stable sensing of the target physical parameters, for instance, relative humidity, temperature, or mass flow.