Zn-doped AlN nanostructures were synthesized via a catalyst-free chemical vapor deposition method
under different growth temperatures. The surface morphologies and size of nanostructures are
significantly affected by the growth temperature. The undoped sample shows an ultraviolet emission
band at 360 nm, which is attributed to the transition from ON to VAl defect complex to the ON level. With
increasing temperature, the doped samples exhibit two new emissions centered at 282 and 320 nm.
The band at 320 nm is related to the nitrogen vacancies, and the band at 282 nm can be ascribed to the
transition from nitrogen vacancies with three positive charges to neutral Zn acceptors. These results
indicate that temperature increase favors the Zn incorporation which strongly affects the growth and
luminescence of samples.