For the Si(001) wafer without metal layer, a 20-nm-thick (100)-oriented β-FeSi2 template was prepared at 743K by the reactive deposition epitaxy (RDE) method. The details of the RDE method were already described in a previous paper [4].
For the Si(001) wafer without metal layer, a 20-nm-thick (100)-oriented β-FeSi2 template was prepared at 743K by the reactive deposition epitaxy (RDE) method. The details of the RDE method were already described in a previous paper [4].