Before deposition, the base pressure was reduced below 10–2 mbar and then increased between 5×10–2 and 6×10–2 mbar after adding of argon via a needle microvalve
Before deposition, the base pressure was reduced below 10–2 mbar and then increased between 5×10–2 and 6×10–2 mbar after adding of argon via a needle microvalve