In this work , we characterize the photocatalytic and anti-
bacterial activity of TiO2 films deposited by ALD at different tem-
peratures . In particular ,the variation of the growth temperature
influences film properties . Here we demonstrate that increasing
growth temperature up to 300 °C clearly improves TiO2 film
photocatalytic activity . However, the process does not show to
have an impact on antibacterial activity . Different routes have to
be followed in order to obtain enhanced antibacterial properties.