In this review, microwave plasma gas-phase synthesis of inorganic materials and
material groups is discussed from the application-oriented perspective of a materials
scientist: why and how microwave plasmas are applied for the synthesis of materials? First,
key players in this research field will be identified, and a brief overview on publication
history on this topic is given. The fundamental basics, necessary to understand the
processes ongoing in particle synthesis—one of the main applications of microwave
plasma processes—and the influence of the relevant experimental parameters on the
resulting particles and their properties will be addressed. The benefit of using microwave
plasma instead of conventional gas phase processes with respect to chemical reactivity and
crystallite nucleation will be reviewed. The criteria, how to choose an appropriate
precursor to synthesize a specific material with an intended application is discussed. A
tabular overview on all type of materials synthesized in microwave plasmas and other
plasma methods will be given, including relevant citations. Finally, property examples of
three groups of nanomaterials synthesized with microwave plasma methods, bare Fe2O3
nanoparticles, different core/shell ceramic/organic shell nanoparticles, and Sn-based
nanocomposites, will be described exemplarily, comprising perspectives of applications