The on-state drain current, I on, is reduced
due to larger capacitance in high depletion-charge channel.
In addition, a high channel doping will also result in band to
band tunneling leakage. Furthermore, the formation of shallow
channel due to thermal budget of dopant activation causes
higher resistance thus reduces drain current [11]. Greater
dopant concentration also causes gate-induced drain leakage
current (GIDL) [14]. Therefore, increasing the channel
doping will negatively impact the CMOS performance and
functionality