An element analysis of metallic multilayers at different
scratch area was practiced by EDAX is displayed in
Table 1. For example AuyNiCryTa films in Table 1, the
content of Au, Ni, Cr, Ta decrease and O and Al increase
with scratch process, it indicate indenter continuous
downwards to substrate. When indenter contacts the
substrate, there are full of O and Al element. So at
different scratch area, there are different elements content,
and it is good agreed with scratch stage. From
different elements content, we can conclude if the
indenter has got to the substrate.