Crystallographic structure of the films was characterized by
x-ray diffraction (XRD, Philips MRD) using a Cu Kα radiation.
Thin film specimens for TEM observation were fabricated
using a focused ion beam (FIB) machine with a micro-sampling
unit. Observations were performed with a JEM-2000EX/T and
TECNAI-F20 (STEM-EDS) microscopes.