The relevant sample was at first decomposed by means of aqua regia digestion
technique and then analysed. The conventional air-acetylene flamewas used for direct analysis. Itwas not
required to use matrix-matched standard or technique of standard additions in the process of calibration
and measurement. The Beer’s law obeyed the concentration range up to 10mg L1. Limit of detection
(3s criterion) reached the value of 0.4mgL1. Sensitivity of determination expressed as characteristic
concentrationwas equal to 0.36mgL1. Repeatability of analysis (n = 5) did not exceed 1% for analytical
determination of sample in question. The method was successfully applied to In(III) leachable content
measurement in the ITO targets sample and the result is in very good agreement with this independently
obtained by reference method – inductively coupled plasma with atomic emission spectrometry.