The commercial operating systemunder investigation was the industrial WWT system located at the test site that includes four CMP tools located in the 35,000 ft2 cleanroom space. Each tool drains into one of two parallel WWT systems: one devoted to acidic slurry waste, and the other devoted to basic slurry waste. While the test site is a research and development facility, the infrastructure, tools, equipment, and products utilized are representative of current state-of-the-art manufacturing facilities.