Schematics showing some of the different methods used to make NEM switches and micrographs (far right) showing actual devices. a, The most commonly used method to construct NEM switches involves the random placement of nanostructures (left) followed by customized addressing and release. b, Another approach is to grow the nanostructure on a substrate that is optimized for growth, and then transfer it to a substrate that is optimized for devices. The nanostructures can be patterned by etching prior to transfer or after transfer. Here, graphene is grown on a copper foil, transferred to a silicon oxide substrate, and patterned with lithography and etch techniques to make resonators. c, Directed self-assembly involves creating a template with regions of greater and lesser affinity for a given material. The template is then placed in a solution containing this material and nanostructures assemble in the regions of greater affinity.d, In patterned growth methods, CVD is used to grow nanostructures from catalysts placed at particular positions on the growth substrate.e, Nanostructure ensembles, such as dense mats of carbon nanotubes, can be grown or deposited on the substrate, and then patterned and addressed