stylus-based surface measurement method is extremely
versatile for an enormous range of roughness. However,
stylus-based surface measurement techniques have some
disadvantages[1]: for example surface damage in some
instances by the stylus force and low efficiency due to
scanning. More details of the advantages and disadvan-tages of different stylus-based surface measurement tech-niques can be obtained from Refs. [1,4–6]. To a large
extent, the deficiencies of stylus methods will make
employing non-contact methods, such as microscopy,
interferometry, phase detection, speckle, light scattering,
etc. a more attractive alternative.