investigated the connecting
transport AMHS in a simplified 300 mm wafer fab. The
simulation results showed that the combination of
vehicles had a significant effect on average travel time,
throughput, and vehicle utilization. When travel time
was the major concern, the suitable method was the
combination of Type-A and Type-D vehicles. When
throughput is the major concern, the suitable method
was the combination of Type-A and Type-C vehicles.
When vehicle utilization was the major concern, the
suitable method is the combination of Type-A and
Type-B vehicles. However, not one method outperformed
the others in all operational scenarios.
investigated the connectingtransport AMHS in a simplified 300 mm wafer fab. Thesimulation results showed that the combination ofvehicles had a significant effect on average travel time,throughput, and vehicle utilization. When travel timewas the major concern, the suitable method was thecombination of Type-A and Type-D vehicles. Whenthroughput is the major concern, the suitable methodwas the combination of Type-A and Type-C vehicles.When vehicle utilization was the major concern, thesuitable method is the combination of Type-A andType-B vehicles. However, not one method outperformedthe others in all operational scenarios.
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