The polycrystalline CdSe films were deposited by the close-spaced vacuum sublimation technique at the
different substrate temperatures (373e873 K). Surface morphology, grain size and growth mechanism of
the films were determined by the scanning electron microscopy. The X-ray diffraction analysis of
structural and sub-structural properties of the films was carried out to study their phase composition
and growth texture. The main structural parameters of thin films, such as texture, lattice parameter, grain
size, scattering domain size and micro-stress level have been determined in the work depending on the
condensation film conditions. RBS and FTIR analysis shows that obtained films in general are homogenous
and pure. As a result, the growth conditions of CdSe polycrystalline films with good crystal quality
were determined.