Another way of creating a
systematic scheme is to look at the mechanisms of plasma
generation, which mainly includes capacitive and inductive
radio-frequency (RF) coupling, microwave, electron-cyclotron
resonance (ECR) and helicon plasmas, hollow cathode,
constricted glow, plasma of sputter magnetron, possibly
enhanced by pulsing, post-ionized vapor sources, and
cathodic arc plasmas.