The main feature of HiPIMS is the combination of sputtering from standard magnetrons using pulsed plasma discharges, where the aim is to generate a highly ionized
plasma with large quantities of ionized sputtered material.The high degree of ionization of the sputtered species has been shown to lead to the growth of smooth and dense
elemental films as well as reactively deposited compound films and enable control over their phase composition,microstructure,as well as mechanical and optical properties. It has also been reported to be beneficial in terms of improving film adhesion,enabling
deposition of uniform films on complex-shaped substrates,and having a decreased deposition temperature. In summary, it is clear that the perspective of having advantages like the ones mentioned above is more than enough reason to continue developing new ionized sputtering techniques such as HiPIMS.