Gold, silver and palladium particles can also be deposited by the electroless deposition under the similar conditions of Pt deposition. We found that the gold particles gave similar morphology of porous silicon as the case of Pt particles. For the silver-particle-modifiedn-Si wafer, only a nanoporous layer that gave strong photoluminescence was formed, where as the palladium particles enhanced the weight loss to five times higher than the value for electrolessly deposited Pt particles, but produced neither a porous layer nor photoluminescence. For n-Si (1 1 1) and p-Si, the Pt particles on Si wafers enhanced silicon etching and porous layer formation.