3D reconstruction of obtained nanostructure area using SEM stereoscopic technique provides significant information in the dimension perpendicular to the surface. Fig. 2 schematically shows the principle of stereo imaging process where points A1 is the original position of point A before tilting and A2 the secondary position after tilting in a 3D coordinate system. Considering angle (h) and centre of tilting (O), the Z coordinate of A is a function of disparity between points A1 and A2 [14]. X1 and X2 are the X coordinates of A1 and A2, respectively. Then ZA can be computed from the following equation: