These studies concern the fab layout only as a custom
configuration and as a track option, which contains
turntables, turnouts, and high-speed express lanes for an
interbay AMHS system. Further research is needed to
compare the performance of a custom configuration
with other types of configuration. More works are
needed for studying how to use direct transport systems
such as a continuous flow transport in 300-mm wafer
fab to eliminate the differentiation between interbay
and intrabay systems, in which lots would be directly
transported from equipment to equipment or from
stockers.