With the development of the MEMS, the great
benefit brought by a microsensor has shown its
charm. But the uncertainty in fabrication still
significantly affects the cavity height and membrane
thickness of the device, which also causes the
deviation between simulation and the actual result.
So the topography test of the fabricated device is
necessary to make sure of the actual dimensions and
property.is the result of a topography test of
the device given by Veeco