Three-dimensional (3D) chip integration with throughsilicon-vias (TSV’s) can enable system benefits of enhanced performance, power efficiency, and cost reduction leveraging micro-architecture designs such as 2.5D silicon packages and 3D die stacks. system application, 3D technology can aide chip manufacturability for lower costs, sub-component heterogeneous integration, modular design and sub-component design reuse, which can reduce development expense and decrease time to market.