Oxides of Ge, B, Ti, and Sn
Clear, crystalline, and glassy films of several oxides were prepared by microwave discharge decomposition of the corresponding alkyls or alkoxides. Films were produced typically at 0.24 Torr on NaCl substrates (for infrared spectroscopic studies) at 200ºC. Growth rates were very low, about 20 Å/min. Table IV summarizes the M-O band infrared absorption and index of refraction measurements. Thus, these oxides were formed with indices (and presumably densities) very close to their thermal counterparts.