The thick-film piezoelectric resonant pressure
sensor is based on the piezoelectric properties of
ferroelectric thick films that act as actuator/sensor on
a deformable diaphragm [20]. The basic construction
of the sensor is shown in Figures 1 and 7. The
resonant sensor has an additional integrated device
(circular thick-film piezoelectric actuator/sensor) for
stimulating and sensing the oscillation of the
diaphragm