Lead zirconate titanate (Pb(ZrxTi1−x)O3: PZT) thin films were fabricated on Pt/Ti/SiO2/Si(100) substrates by a hybrid process comprising the sol–gel method and pulsed-laser deposition, using various targets of Pb(ZrxTi1−x)O3 with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70. The effect of Zr/Ti ratio on the crystal structure and microstructure of the PZT films was investigated. The results of X-ray diffraction analysis indicated that the Zr/Ti ratio of the films fabricated using the target with a Zr/Ti ratio of 45/55 is close to that of the morphotropic phase boundary. The rosette structure was observed in Zr-rich PZT films, but not in Ti-rich PZT films. The PZT films fabricated using the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout their thickness, and no pyrochlore phase on the surface was observed.
Crystal structure and microstructure of lead zirconate titanate (PZT) thin films with various Zr/Ti ratios grown by hybrid processing. Available from: https://www.researchgate.net/publication/244257703_Crystal_structure_and_microstructure_of_lead_zirconate_titanate_PZT_thin_films_with_various_ZrTi_ratios_grown_by_hybrid_processing [accessed Jan 25, 2016].