The tubes possessed 100% tetragonal phase, their typical outer diameter
was 50 μm, inner diameter 30 μmand length 1 cm.MgO films were deposited fromβ-diketonate-type precursor
2,2,6,6-tetramethyl-heptanedionato-3,5-magnesium(II) at 220 °C by atomic layer deposition.
The tubes possessed 100% tetragonal phase, their typical outer diameterwas 50 μm, inner diameter 30 μmand length 1 cm.MgO films were deposited fromβ-diketonate-type precursor2,2,6,6-tetramethyl-heptanedionato-3,5-magnesium(II) at 220 °C by atomic layer deposition.
การแปล กรุณารอสักครู่..
