Depositing B-doped silicon-rich Sio2 (SRo) thin films with subse- quent high-temperature annealing is one of the most popular methods for preparing Sio2-matrix B-doped Si-Nc (BDs) thin films (4-81 Most of the B-doped Si Ncs were "geometrically isolated" in theamorphous ma- trix (4,7,81. The dangling bonds and other defects (non-bridging oxygen hole center, dangling bonds and oxygen-related defects) preferentially generated at the grain boundaries, which would reduce the carrier con- centration and efficiency of light emission 9-11