Development of a dust removal system using static electricity has been conducted. It is envisioned that the
system can collect and transport dust under vacuum. In the system, the dust is charged by dielectric
polarization and floated by an electrostatic attraction force that is generated by a dc electric field. The dust is
then transported by the electric curtain formed by a three-phase ac electric field. Experimental investigation
has been initiated to examine the characteristics of the system. It was found that carbon and copper particles
measuring 5-44 pm were successfully removed from the bottom of the chamber under a vacuum environment.
Copyright 0 1996 Published by Elsevier Science Ltd.
Key words: Dust, dust removal, electric curtain, electrostatic force, static electricity.