The principal parts of a CC Pare shown schematically in Fig. 6.1. In its simplest form,
the rf voltage is appliedacross two parallel metal plates,generating an oscillating electric
field between them. This field accelerates electrons, heating their thermal distribution
to have enough high-energy electrons in the tail to cause an ionization avalanche. The
density rises to an equilibrium value set by the rf power and the density of the neutral gas.