The EDS detector used in this study has been optimised for use with
ultra high resolution imaging conditions in SEM. Typically these imaging
conditions require lowincident electron energies and shortworking
distances [1]. To increase detection efficiency, X-Max Extreme has a radically
redesigned geometrywith reduced take of angle to achieve an analyticalworking
distance of sub 5mminmany instruments. The sample
to sensor distance is also minimised, typically halved when compared
with a conventional 80 mm2 EDS detector, and therefore the detector