shows the dimensions of a prototype doubleended
tuning fork quartz resonator, where the resonator was
made of quartz crystal Z-cut wafer using wet etching and
photolithography. It was etched for a sufficiently long time
so that the residual edges of the x plane disappeared. As
the electrodes, two metal layers of chromium and aurum
were evaporated. The other quartz plates as a spacer are
placed between the metal package and the support parts of
the resonator, as shown in Fig. 1, where the support parts of
the resonator are bonded at the metal package by the epoxy
adhesive. The strain on the resonator by the curing of the
adhesive was resolved by heat treatment. The photograph in
Fig. 6 is that of a prototype double-ended tuning fork quartz
resonator.