Crystalline BaTiAl6O12 target was prepared from reagent-grade BaCO3, TiO2 and Al2O3. The components were mixed together and pressed into a cylindrical pellet, which was heated at 1450°C
during 3 hours. Powder X-ray diffraction (XRD) was carried out with a Siemens D5000 diffrac to meter. The pattern were collected with monochromatic Cu-Kα radiation(1.5406Å)over the angular range 10r2θr60° in a step size of 0.02° and a fixed counting time of 2 seconds/step. By using the synthesized target, BaTiAl6O12 thin films were grown on 2-inch diameter double-side polished c-plane sapphire wafers (thickness 430 mm) by off-axis pulsed laser deposition (PLD). 120,000 laser pulses from a KrF excimer laser(wavelength 248 nm) were applied with a pulse frequency of 20 Hz.The BaTiAl6O12 films were grown on the substrate kept at room temperature and with 0.001 m bar oxygen partial pressure.
More experimental details about the PLD of fresnoite films are given in