Capacitance-to-digital converter
New standard in single chip solutions
Interfaces to single or differential grounded sensors
Resolution down to 20 aF (that is, up to 19.5-bit ENOB)
Accuracy: 10 fF
Linearity: 0.01%
Common-mode (not changing) capacitance up to 17 pF
Full-scale (changing) capacitance range ±8 pF
Update rate: 5 Hz to 45 Hz
Simultaneous 50 Hz and 60 Hz rejection at 8.1 Hz update
Active shield for shielding sensor connection