Since the capping oxide layer was expected to
suppress the surface oxidation of the L10 FePt films during RTA, it
can be implied that surface oxidation of the L10 FePt films which
induces strong tensile stress probably play a very important role in
enhancing the perpendicular anisotropy. Further investigations are
required to fully understand surface-oxidation phenomena and
resultant surface stress of the FePt films during RTA.