The optimized 1:5:0.3 volume percentage titanium (IV) isopropoxide,ethanol and diethanolamine sol has been used for the
preparation of 1 to 6 wt% of Ni, Fe and Nb doped TiO2 thin filmon fused silica substrate and powders. Nitrates of Iron and Nickel with 99.9% purity and Niobium chloride having purity of 99.995% from Sigma–Aldrich has been used without any further purification.The sol composition optimized was used for spray and flow coating process.