In this work, the flow rates of carrier gas/auxiliary carrier gas for platform vaporization and tube wall vaporization fluorination assisted ETV–ICP-MS have been investigated, and it was found that the signal intensities of the target analytes were decreased remarkably when the auxiliary carrier gas flow rate was higher than 700 mL min−1 in both platform and wall vaporization fluorination assisted ETV–ICP-MS, possibly due to gas dilution effect and tube cooling.Fig. 5 was the effect of carrier gas flow rate on the signal intensity in both platform and wall vaporization fluorination assisted ETV–ICP-MS by taking V as an example. Based on the above experimental results, a sample carrier gas of 400 mL min −1 with the auxiliary carrier gas of 400 mL min−1 were selected as the optimal gas flow rate for platform vaporization, while a sample carrier gas of 400 mL min −1 with the auxiliary carrier gas of 500 mL min −1 were employed for wall vaporization in subsequent experiments.